Hartung-Gorre Verlag
Inh.: Dr.
Renate Gorre D-78465
Konstanz Fon:
+49 (0)7533 97227 Fax: +49 (0)7533 97228 www.hartung-gorre.de
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S
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Series in
Microelectronics
edited by
Wolfgang Fichtner,
Qiuting
Huang
Andreas Schenk
Mathieu Maurice Luisier
Bernd
Witzigmann
Lorenzo Ciampolini,
Scanning Capacitance Microscope Imaging and Modelling.
2002. XVI, 162 pages.
ISBN 3-89649-788-X
Abstract:
This thesis deals with the modelling of an advanced
characterization technique for semiconductor devices, the Scanning Capacitance
Microscopy (SCM), a promising candidate for the quantitative analysis of
sub-micron 2D dopant distributions, vital data for the Technology CAD engineer.
The thesis describes accurately the experimental SCM technique and proposes an highly efficient technique for its modelling, which is
based on device simulation. The model results are compared with experimental results.
Keywords: Scanning,
Capacitance, Microscope, Imaging, Modelling, SCM
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Konstanz / Germany
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