Series in Microelectronics

edited by Wolfgang Fichtner
Qiuting Huang
Heinz Jäckel
Hans Melchior
George S. Moschytz
Gerhard Tröster

Vol. 151

Dominik Christoph Müller,
Deactivation and Activation of Donors in Silicon.
2005; 180 pages. 64,00. ISBN 3-89649-977-7

Topic of this dissertation is the examination of processes which are responsible for the deactivation of donors in heavily doped silicon. In CMOS technology of the near future, source, drain, and channel regions of transistors need to feature doping concentrations in excess of the respective solid solubility limits. At the same time, every donor atom should release one of its electrons to the bulk, thereby contributing to a raise in electrical conductivity in the corresponding region. In this work, extensive computer simulations have been carried out in order to shed light upon the atomic scale mechanisms involved in the entire deactivation process. The conclusions of the theoretical studies in conjunction with published experimental data can be summarized as the step model of donor deactivation. This model is developed and elucidated in this work. The last part of the thesis discusses possible co-dopants and their effectiveness at forestalling the deactivation process.

Dominik Christoph Müller was born in Zürich, Switzerland, on September 17, 1973. He studied Physics at the Swiss Federal Institute of Technology (ETH) in Zürich. In 1999 he received his Master Degree in Physics from ETH Zürich. In the same year he joined the Biomedical Engineering Laboratory where he worked on new methods for localized 1H and 13C NMR Spectroscopy for the detection of metabolites in the human brain. In 2000, he joined the Integrated Systems Laboratory as a research and teaching assistant, where he worked on the modeling of atomic-scale processes by means of Density Functional Theory. The current focus of his work is on the examination of processes in highly doped silicon that have to be dealt with in connection with the down-scaling of semiconductor devices.

Keywords (English): Semiconductor, Silicon, Donor, Activation, Deactivation, Antimony, Arsenic, Phosphorus, Density Functional Theory, Co-doping
Keywords (German): Halbleiter, Silizium, Donatoren, Aktivierung, Deaktivierung, Antimon, Arsen, Phosphor, Dichtefunktional-Theorie, Co-Dotierung

Series in Microelectronics

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