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Series in Microelectronics
edited by Wolfgang Fichtner
Qiuting Huang
Heinz Jäckel
Gerhard Tröster
Bernd Witzigmann
Luca Sponton,
From manufacturing variability to process-aware
circuit simulation.
2009, 162 pages. € 64,00. ISBN 3-86628-230-3 and
978-3-86628-230-8
Abstract:
Various sources of variability affect semiconductor
manufacturing processes. This work presents modeling approaches that help to
analyze these fluctuations in order to counter them by delivering robust
designs to the foundry. The first part introduces the methodology used to
implement the information transfer from the analysis of process variations to
the stage of circuit design. In the second part, a robust three-dimensional parametric
transistor model has been devised to study quantitatively the impact of process
fluctuations. Finally, the first process-aware SPICE model generated from
three-dimensional simulations is presented. This model allows the analysis of
the effects of process variability, including process-geometry interactions, at
the circuit level.
About the Author:
Luca Sponton received the Laurea cum Laude in
electrical engineering in 2000 from the University of Padova, Italy.
In the same year he joined
STMicroelectronics in Milano, Italy, as a Process Development Engineer, working
on the development of ESD protection structures and circuits for smart-power
processes.
In 2004 he joined the Integrated
System Laboratory at the Swiss Federal Institute of Technology (ETH) in Zurich,
Switzerland, as a research assistant. His main research interests are in the
field of numerical simulation of semiconductor process and devices and Design
For Manufacturing. In September 2007 he joined Synopsys Switzerland.
Keywords: Design for Manufacturing, TCAD, Semiconductor devices,
Process Simulation, 3D simulation, LER
Series in Microelectronics
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