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S

Series in Microelectronics

edited by Wolfgang Fichtner
Qiuting Huang
Heinz Jäckel
Hans Melchior
George S. Moschytz
Gerhard Tröster

Vol. 97

Luis Villablanca

Mesh Generation Algorithms

for Three-Dimensional

Semiconductor Process Simulation.

2000. VIII, 104 pages. € 49,80

ISBN 3-89649-583-6

Abstract:

This dissertation describes a set of algorithms that can be used to generate finite element meshes for three-dimensional semiconductor process simulation.

The first contribution is the description of a new type of mesh which is suitable for the Box Method. This description is combined with an algorithm that can be used to convert any mesh into a Box Method conforming mesh.

Additionally, a new algorithm is described, which is able to handle the changes of the material boundaries during process steps like deposition and etching. Finally, a technique is described which can be used to improve the numerical stability of the algorithms computing geometric expressions.

Series in Microelectronics

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