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Scientific Reports on Micro and Nanosystems
edited by Christofer Hierold
Vol. 26
Silke Christina Wouters
New Type of Three-Axis Hall Sensor
Designed for High-Accuracy
Magnetic Field Measurements
1st Edition 2017. XXII, 166
pages. € 64,00.
ISBN
978-3-86628-593-4
Hall sensors (1D and 3D) are routinely used in magnetic field measurements
of beamline magnets, insertion devices, and detector magnets at research
institutes and accelerator facilities. These measurements are a high-end
application of Hall sensors, demanding high accuracies up to 10-4 (at 1 T
level) or even beyond. While this is consistently achieved with uniaxial (1D)
Hall sensors in a single-component magnetic field volume, the measurement of
all three components of a magnetic field, simultaneously to high accuracy with
Hall sensors, remains a challenge. None of the commercially available
three-axis (3D) Hall sensors proclaims similar measurement accuracy to 1D Hall
sensors. Currently, 3D Hallsensors suffer from
either, or a combination, of the following: large spatial distribution between
sensors’ active areas; high signal noise; cross-sensitivity among measurement
axes due to angular errors or due the planar Hall effect (PHE); the inability
to measure at a single point in space and time.
A new type of three-axis Hall sensor is proposed, consisting of three
pairs of uniaxial Hall sensors in a very small active volume. Due to its unique
configuration, the new sensor can address current three-axis Hall sensor
limitations — it provides: a high spatial resolution of 30 μm
× 30 μm × 1 μm
for each field component; the full field vector measurements practically at a
single point in space and time; and compensation of the planar Hall effect as
well as loop-induced voltages by the pairs of 1D Hall sensors. The feasibility
of the proposed sensor has been proven in a prototype with an active volume as
small as 200 μm × 200 μm
× 200 μm and outer dimensions of 4 mm × 4 mm × 4
mm. Its design, fabrication, 3D characterization and calibration is reported on.
Keywords:
Hall sensor; three-axis Hall sensor; 3D Hall sensor; magnetic field sensor;
Hall generator; magnetic field vector; Hall effect; planar Hall effect;
calibration.
Scientific Reports on Micro and Nanosystems
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