Hartung-Gorre Verlag
Inh.: Dr.
Renate Gorre D-78465
Konstanz Fon:
+49 (0)7533 97227 Fax: +49 (0)7533 97228 www.hartung-gorre.de
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S
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Series in MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
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Vol. 1: Philippe A. Passeraub, |
In this book,
the possibility and the interest of integrating an inductive proximity sensor
on a single chip is demonstrated. The first integrated inductive proximity sensor
is presented. It is made of a single sensing flat coil with a simple electronic
circuit interface integrated on the same substrate. High sensitivity and high
performances have been achieved with this new device. Its fabrication uses CMOS
standard processes and CMOS compatible post processes. The usefulness of this
integrated proximity microsensor as a key component
in new sensing and mechatronic applications is established.
Direkt bestellen bei / to order directly from:
Hartung-Gorre
Verlag / D-78465 Konstanz / Germany
Telefon: +49 (0) 7533 97227 Telefax: +49 (0) 7533 97228
http://www.hartung-gorre.de eMail: verlag@hartung-gorre.de