Hartung-Gorre Verlag
Inh.: Dr.
Renate Gorre D-78465
Konstanz Fon:
+49 (0)7533 97227 Fax: +49 (0)7533 97228 www.hartung-gorre.de
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S
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Series in MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
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Vol. 12: Christine Alépée Technologies for High-Temperature Silicon Microreactors. 2000, 216 pages, € 49,80. ISBN 3-89649-635-2
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Thanks to
their characteristic high surface to volume ratios, chemical microreactors
present many potential advantages compared to conventional reactors. However,
research in this field is still in its infancy and many technological issues
still have to be solved. This book addresses several of these issues
considering the particular case of high-temperature silicon microreactors. It
mainly presents a thorough study and comparison of Pt and polySi thin films for
high-temperature resistive heating and temperature sensing applications and
also addresses heat transfer and thermal behaviour questions that were studied
via experimental measurements as well as numerical and analytical models..
Keywords: high surface to volume ratios, chemical microreactors,
high-temperature silicon microreactors, Pt and polySi thin films, heat
transfer, thermal behaviour.
Direkt bestellen bei / to order
directly from:
Hartung-Gorre
Verlag / D-78465 Konstanz / Germany
Telefon: +49 (0) 7533 97227 Telefax: +49 (0) 7533 97228
http://www.hartung-gorre.de eMail: verlag@hartung-gorre.de