Series in MICROSYSTEMS
edited by P. A. Besse,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 15:
Charles Massin,
Microfabricated Planar Coils in Nuclear Magnetic Resonance.
2004, 210 p., € 64,00. ISBN 3-89649-903-3
This book describes the development of microfabricated planar coils for applications in the field of Nuclear Magnetic Resonance (NMR) spectroscopy and Magnetic Resonance Imaging (MRI). The electrical characterization in a frequency range of 10 MHz to 1.8 GHz of a family of integrated inductors fabricated using copper electroplating on a glass substrate is presented. Inductance values on the order of 10 nH with series resistance smaller than 1 W are obtained, yielding quality factors above 50 at 1 GHz, and self-resonance frequencies larger than 1 GHz. The main mechanisms causing losses, skin and proximity effects taking place in the coil’s wires, are analyzed in detail through electromagnetic simulations. The usefulness of planar coils having inner diameters ranging from 100 mm to 2 mm for NMR spectroscopy experiments in microfluidic chips (nanoliter sample volumes) and MRI of biological samples is demonstrated. Factors limiting performance are identified and design rules are elaborated. Finally, a framework is provided to analyze the commercial potential of the developed technology.
About the author:
Charles Massin was born in Lausanne, Switzerland, in 1973. He received a diploma in micro-engineering from the Swiss Federal Institute of Technology – Lausanne (EPFL) in 1999, after carrying out his diploma project at the University of California, Davis, USA. He then joined the Institute of Microelectronics and Microsystems at EPFL as a research and teaching assistant. After being awarded a scholarship, he obtained his Ph.D. in 2003 for his work on microfabricated NMR probes. His current research interests include miniaturized NMR sensors, microsystems for (bio)chemical analysis and related commercialization aspects.
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