Series in
MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 20:
Marc Antonius Friedrich van den Boogaart
Stencil
lithography:
An ancient
technique for advanced
micro- and nanopatterning
2006,
VIII, 182 p.; € 64,00. ISBN 3-86628-110-2
An increased
demand for micro- and nanometer scale patterning on “unconventional” surfaces
and/or non-IC applications has given rise to new and alternative patterning
technologies. These new methods include: indentation of polymers by nanoimprint
lithography (NIL), local deposition of molecules via a stamp by micro contact
printing (µCP) or soft-lithography, or via dip-pen nanolithography (DPN),
nanoscale fluidic dispensing (NADIS) and localized material deposition thr
This book
describes the advancements made in micro and nano patterning via stencil
lithography. Stencil lithography is a resist-less and direct pattern technique
where a controlled amount of material is deposited through apertures on to a
substrate in a vacuum environment. This unique approach enables large scale
micro and nano structuring of unconventional materials and on a large range of
substrates otherwise not possible using conventional photolithography.
Marc Antonius Friedrich van den Boogaart was born in
Rotterdam, The Netherlands, in 1977. He received his Diploma in Precision
Engineering (Fijn Mechanische Techniek) from the Hogeschool van Utrecht,
Utrecht, The Netherlands in 2000 after carrying out his diploma project at
Utrecht Micro Engineering Competence Centre (UMECC), The Netherlands. He then
joined the department of Signals and Systems at the University of Twente, Enschede, The Netherlands
as a Micro Engineer where he designed, developed and produced multi-electrode
array's (MEA's) for use as neuroelectronic interfaces. The MESA+ institute
facilitated as production facility. In 2002 he joined the Institute of
Microelectronics and Microsystems at the Ecole Polytechnique Fédérale de
Lausanne (EPFL), Switzerland, as a research and teaching assistant. In 2006 he
obtained his Ph.D. for his work on the development Stencil Lithography, a
large-scale and resist-less micro and nano patterning technique.
Keywords: Shadow mask, stencil, stencil
lithography, planar stencil membranes, stabilized stencil membranes, physical
vapor deposition, micro and nano patterning, finite element method, FEM,
dynamic stencil lithography.
Direkt bestellen bei / to order directly from: Hartung.Gorre@t-online.de