Series in MICROSYSTEMS
edited by P. A. Besse,
R. S. Popovic,
Schahrazède Lila Mouaziz
Micro and Nano Tools for Magnetic Field Imaging
2007, XXIV, 154 p.; € 64,00. ISBN 3-86628-154-4
This book describes the design, fabrication and characterisation of the micro and nano tools for magnetic field imaging. A microfabrication technique has been developed to produce hybrid devices consisting of micro-nano Hall sensors integrated on SU-8 cantilevers. Two materials have been used to produce the Hall sensors. First, bismuth (Bi) was chosen for its low carrier charge density and its negligible surface charge depletion effects. The second material tested was nickel (Ni), chosen for the dominant effect called the extraordinary Hall effect. Bi micro-Hall sensors have shown a fragility making them delicate to handle. However, the Ni micro-Hall sensors had an excellent functionality. Their characterization has shown sensors with a low sensitivity compensated by the high applied current providing a high magnetic field resolution. The scanning Hall probe microscopy (SHPM) allows images that were carried out using the Ni micro-Hall sensors. The magnetic field resolution is better than 1 mT/Hz1/2, a result comparable to the high resolution offered by the semiconductors. Also, single crystal silicon cantilevers have been fabricated for use in the magnetic resonance force microscopy (MRFM) experiments. Cantilevers with integrated micro-magnets have been successfully produced. The production yield is higher than 70%. The Rayleigh method adapted to the cantilevers geometry, made possible the estimation of the theoretical resonance frequencies. The calculated values fit well with the measured ones. All the cantilevers have a quality factor above 20000 and the force sensitivity achieved was between 10-16 and 10-17 N/Hz1/2. The realized probes represent micro and nano tools suitable for the magnetic field imaging that can be done with the SHPM and MRFM techniques.
Schahrazède Lila Mouaziz was born in Oran -Algeria- in 1973. She studied physics at the University of Es-Senia (Oran) and received a Diploma in advanced studies in physics in 1995. She pursued her studies at the University of Neuchâtel -Switzerland- and received the Diploma in physics (Masters) in 2001. She then worked as a research assistant at the Institute of Applied Optics of the Swiss Federal Institute of Technology (EPFL), Lausanne -Switzerland- in collaboration with the Sensors, Actuators and Microsystems Laboratory of the University of Neuchâtel and NanoWorld Innovative Technologies on the SU-8 AFM cantilevers and hybrid nitride probes. Since 2003 she has joined the Microsystems and Nanoengineering Laboratory of the Swiss Federal Institute of Technology in Lausanne (EPFL). In 2007 she obtained her Ph.D. for her work on the development of micro and nano tools for the magnetic microscopy.
Keywords: Micro Tools, Nano Tools, Magnetic Field Imaging, hybrid devices, SU-8 cantilevers, Hall sensors
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