Series in MICROSYSTEMS
edited by P. A. Besse,
R. S. Popovic,
Johannes Antonius Jeroen Steen
Electrically Conducting and Wear-Resistant
Nanoprobes for Scanning Probe Applications
2008, 180 p.; € 64,00. ISBN 3-86628-186-2
Conventional metal-coated Si probes suffer from wear and melting at the tip extremity at high current densities. The sensitivity to melting and wear is a serious limitation, since the probes get disabled. This work addresses and resolves these problems. The approach used is to fabricate full metal cantilevers with integrated metal nanometrically sharp tip, using a probe material that has a high hardness, a high melting temperature, a good electrical conduction and a good resistance to oxidation. This book describes the design, microfabrication, characterisation including benchmarking against conventional Si probes, and demonstrates applications of the fabricated electrically conducting probes.
About the author
Johannes Antonius Jeroen Steen was born in Best, The Netherlands, in 1978. He received his M.Sc. degree in Applied Physics in 2002 from the University of Twente, The Netherlands. With his francophilic mind, he accepted the opportunity to start his Ph.D. in Microtechnology at the Ecole Polytechnique Fédérale de Lausanne, Switzerland. In the framework of his Ph.D. he spent the year 2006 in the Land of the Rising Sun at the Institute of Industrial Science, University of Tokyo, Japan. Jeroen received his Ph.D. degree in 2007 for his work on microfabricated electrically conducting and wear-resistant nanoprobes.
Keywords: Micro Tools, Nano Tools, oxidation, electrically conducting probes
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