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Renate Gorre D-78465
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Series in
MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 23:
Özge Zorlu
Orthogonal Fluxgate Type Magnetic
Microsensors with Wide Linear Operation
Range
2008, XIV, 172
p.; € 64,00.
ISBN-10: 3-86628-198-6
ISBN-13: 978-3-86628-198-1
This book describes the development of microfabricated
fluxgate magnetometers for wide linear operation range. Fluxgate type magnetic
sensors are powerful devices due to their high sensitivity, low offset, and
high temperature stability of the offset. Unfortunately, their linear operation
range is limited, since an attempt to increase the linear range also increases
the power dissipation of the sensor for the traditionally used parallel
fluxgate configuration. In this study, microfabricated
fluxgate sensors with wide linear operation range and low power dissipation are
developed with the use of the orthogonal fluxgate configuration and a closed
magnetization path for the excitation. The development, fabrication, and
characterization of three different fluxgate sensor structures are described in
the book. The sensor structures are named as: rod type orthogonal macro
fluxgate sensor, rod type orthogonal micro fluxgate sensor, and ring type micro
fluxgate sensor. All of the structures have a CMOS compatible fabrication
process flow. Furthermore, the rod type micro sensor and the ring type micro
sensor are fabricated by using only standard thin film deposition and
photolithography techniques, enabling batch fabrication of these sensor structures.
All of the structures use planar sensing coils and an electroplated FeNi core. Apart from the design and development of the
sensor, the FeNi electroplating process is
intensively investigated since this process directly affects the performance of
the sensors.
Özge Zorlu was born in Zonguldak, Turkey, in 1978. He received his B.Sc. and M.Sc.
degrees from the Middle East Technical University, Department of Electrical and
Electronics Engineering, Ankara, Turkey in 2000 and 2002, respectively. He
worked as a research and teaching assistant in the same department between 2000
and 2003. He then joined the Institute of Microelectronics and Microsystems at
the École Polytechnique Fédérale de Lausanne (EPFL), Switzerland, as a research and
teaching assistant. In 2008, he obtained his PhD degree for his work on microfabricated fluxgate magnetometers for wide linear
operation range. His research interests include microfabricated
and CMOS-compatible sensor design, microfabrication technologies, and process
development.
Keywords: magnetic sensor, orthogonal fluxgate, wide linear range,
microfabrication, electroplated FeNi, CMOS
compatible, low power.
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