Inh.: Dr. Renate Gorre
+49 (0)7533 97227 Fax: +49 (0)7533 97228
Series in MICROSYSTEMS
edited by P. A. Besse,
R. S. Popovic,
Orthogonal Fluxgate Type Magnetic
Microsensors with Wide Linear Operation
2008, XIV, 172
p.; € 64,00.
This book describes the development of microfabricated fluxgate magnetometers for wide linear operation range. Fluxgate type magnetic sensors are powerful devices due to their high sensitivity, low offset, and high temperature stability of the offset. Unfortunately, their linear operation range is limited, since an attempt to increase the linear range also increases the power dissipation of the sensor for the traditionally used parallel fluxgate configuration. In this study, microfabricated fluxgate sensors with wide linear operation range and low power dissipation are developed with the use of the orthogonal fluxgate configuration and a closed magnetization path for the excitation. The development, fabrication, and characterization of three different fluxgate sensor structures are described in the book. The sensor structures are named as: rod type orthogonal macro fluxgate sensor, rod type orthogonal micro fluxgate sensor, and ring type micro fluxgate sensor. All of the structures have a CMOS compatible fabrication process flow. Furthermore, the rod type micro sensor and the ring type micro sensor are fabricated by using only standard thin film deposition and photolithography techniques, enabling batch fabrication of these sensor structures. All of the structures use planar sensing coils and an electroplated FeNi core. Apart from the design and development of the sensor, the FeNi electroplating process is intensively investigated since this process directly affects the performance of the sensors.
Özge Zorlu was born in Zonguldak, Turkey, in 1978. He received his B.Sc. and M.Sc. degrees from the Middle East Technical University, Department of Electrical and Electronics Engineering, Ankara, Turkey in 2000 and 2002, respectively. He worked as a research and teaching assistant in the same department between 2000 and 2003. He then joined the Institute of Microelectronics and Microsystems at the École Polytechnique Fédérale de Lausanne (EPFL), Switzerland, as a research and teaching assistant. In 2008, he obtained his PhD degree for his work on microfabricated fluxgate magnetometers for wide linear operation range. His research interests include microfabricated and CMOS-compatible sensor design, microfabrication technologies, and process development.
Keywords: magnetic sensor, orthogonal fluxgate, wide linear range, microfabrication, electroplated FeNi, CMOS compatible, low power.
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